INNOMAX

ASTRO (Single Spin Processor) is an INNOMAX’s Single spin type equipment that can be handled various processes such as Wafer Cleaning, Etching, and Strip in the Semiconductor manufacturing process.

TRAUM (WET-STATION) is a BATCH processing method that processes Etching, Stripping, etc. during the semiconductor manufacturing process and processes 1 to 50 WAFER sheets in accordance with USER specifications This equipment can be used by CASSETTE TYPE and CASSETTELESS TYPE.

The cassette cleaner is a Equipment that cleans and dries the Foup, Cassette, and Cassette Boxes using a rotating method.

Sorter is a Equipment that automatically executes Wafer's Sorting, Gathering, and Merge operations for efficient semiconductor production and Fab operation.

The Spin Lab Series is the best Single wafer spin processing Equipment for development purposes such as universities and research centers.