도전과 혁신을 통하여 비상하는 회사
(주)이노맥스입니다.
■ Features
1. INNO MAX's own independent development equipment
2. Flexibility to process not only 300mm but also 200mm
3. Standard or Customized design by customer's requirements
4. Patent wafer transfer robot for high throughput
4. Reliable & User friendly software and hardware
5. Short lead time through standardized design
6. Low consumptions of DIW & Chemicals
■ Specification